Digitally-Controlled Magnetic Levitation Turbo Molecular Pump UTM-FH/FW Series

Digitally-Controlled Magnetic Levitation Turbo Molecular Pump

UTM-FH/FW Series

The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings. The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle~hard processes.

Features

•Abundant variations from 350L/s (12.3CFM) to world's largest 6300L/s(222.4CFM) (digital magnetic controlled bearing type).
•Maintainable stable pumping performance against change of back pressure (FH series).
•Optional internal heating system to control rotor temperature and reduce adhesion of side reaction by-products (FW series).
•Excellent anti-corrosion surface treatment (excluding 3303FH and 6300FH). Optional special surface treatments (e.g. Nickel plating + cation electro-deposition, special deposited film, aluminum anodization) are available as necessary.
•Mountable in all direction.
•Variable speed system marks it possible to change the pumping speed in the rang from 25% through 100%.
•There is not limitation to combine any power supply and pump main unit to change cable length because of using coupling free system and tuning free system.
•Self power generation by regenerative energy is used for backup power supply at power outage by using buttery free system. Troublesome buttery replacement is not necessary.
•Built-in monitoring/self-diagnostic and communication functions enable to configure centralized monitoring system.
•Safety design with fracture energy absorption construction can reduce damage on vacuum system when trouble happened with the pumps.
•High durability and high reliability have been realized by experiments such as air rushing-in testing, various touching down testing, forced destruction testing for rotor and foreign material drop testing (Si wafer fall)

Applications

•UTM-FH series
•Main evacuation of light ~middle processes such as evaporator, sputtering system, dry etching, etc where there are not any side reaction by-products.
•Main evacuation of analytical instrument, R&D system, laboratory equipment, etc.
•Main evacuation for those equipment and system for light gas such as H2 and He.
•Multiple turbo molecular pumps with centralized back pump configuration.

•UTM-FW series
•Main evacuation of middle to hard processes such as dry etching, CVD system, etc.
•High flow gas evacuation for dry etching, CVD system, sputtering system, etc.
•Main evacuation of analytical instrument, R&D system, laboratory equipment, etc.

Specifications

*1
Value measured in accordance with JVIS005 standard, or calculated value based on it

*2 Protective mesh isn't used.

Tel：0086-21-50878197
E-mail：service@vacuumfamily.com
Skype：Kevin.law012
Web site：www.vacuumfamily.com